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Volumn 80, Issue 21, 2002, Pages 3907-3909
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Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON ENERGY DISTRIBUTION FUNCTIONS;
INERT GAS MIXING;
ION DENSITY RATIO;
ION SPECIES;
MIXING RATIOS;
PLASMA PARAMETER;
DISSOCIATION;
DISTRIBUTION FUNCTIONS;
ELECTRIC DISCHARGES;
ELECTRIC POWER DISTRIBUTION;
ELECTRON ENERGY ANALYZERS;
ELECTRON ENERGY LEVELS;
ELECTRON TEMPERATURE;
INDUCTIVELY COUPLED PLASMA;
XENON;
IONS;
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EID: 79955998273
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1479452 Document Type: Article |
Times cited : (26)
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References (21)
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