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Volumn 80, Issue 21, 2002, Pages 3907-3909

Control and analysis of ion species in N2 inductively coupled plasma with inert gas mixing

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; INERT GAS MIXING; ION DENSITY RATIO; ION SPECIES; MIXING RATIOS; PLASMA PARAMETER;

EID: 79955998273     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1479452     Document Type: Article
Times cited : (26)

References (21)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.