Tuning the electron temperature of a nitrogen plasma by adding helium and argon

Physics of Plasmas

Volumn 10, Issue 10, 2003, Pages 4118-4122

  Ma, Jie ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; HELIUM; IONIZATION; PARTIAL PRESSURE; PLASMA DENSITY;

ELECTRON TEMPERATURE;

INDUCTIVELY COUPLED PLASMA;

EID: 0142219929     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1605950     Document Type: Article

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