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Volumn 92, Issue 4, 2008, Pages

Energy-band alignment of Hf O2 Si O2 SiC gate dielectric stack

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON EMISSION; GATE DIELECTRICS; LEAKAGE CURRENTS; SILICON CARBIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 38849208643     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2839314     Document Type: Article
Times cited : (42)

References (15)
  • 5
    • 34548630910 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.2776254.
    • L. M. Lin and P. T. Lai, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2776254 102, 054515 (2007).
    • (2007) J. Appl. Phys. , vol.102 , pp. 054515
    • Lin, L.M.1    Lai, P.T.2
  • 7
    • 33847142715 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.2432402.
    • C. M. Tanner, J. Choi, and J. P. Chang, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2432402 101, 034108 (2007).
    • (2007) J. Appl. Phys. , vol.101 , pp. 034108
    • Tanner, C.M.1    Choi, J.2    Chang, J.P.3
  • 8


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.