Preparation and refractive index of nano BST thin films

Chinese Journal of Chemical Physics

Volumn 20, Issue 6, 2007, Pages 706-710

  Li, Song Zhan ^a   Yang, Yan Qin ^a   Liu, Wen Cong ^a   Zhang, Tian Jin ^b   Qi, Ya Jun ^b  

^a WUHAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUBEI UNIVERSITY   (China)

Author keywords

BST thin film; Deposition parameter; Radio frequency magnetron sputtering; Refractive index

Indexed keywords

ANNEALING; ARGON; BARIUM COMPOUNDS; FIELD EMISSION MICROSCOPES; FILM PREPARATION; MAGNETRON SPUTTERING; OXYGEN; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; STRONTIUM COMPOUNDS; SUBSTRATES; TEXTURES; THIN FILMS; TITANIUM COMPOUNDS;

ANNEALING TEMPERATURES; BST THIN FILMS; DEPOSITION PARAMETERS; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; RADIO FREQUENCY MAGNETRON SPUTTERING; REFRACTIVE INDEX INCREASE; SUBSTRATE TEMPERATURE; TRANSMISSION SPECTRUMS;

REFRACTIVE INDEX;

EID: 38849186160     PISSN: 16740068     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-0068/20/06/706-710     Document Type: Article

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