Characterisation of BaxSr1-xTiO3 films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction

Journal of Non-Crystalline Solids

Volumn 303, Issue 1, 2002, Pages 179-184

  Petrik, P ^a   Khanh N Q ^a   Horvath Z E ^a   Zolnai, Z ^a   Barsony I ^a   Lohner, T ^a   Fried, M ^a   Gyulai, J ^a   Schmidt, C ^b   Schneider, C ^b   Ryssel, H ^b,c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CHARACTERIZATION; ION BEAMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 0036567774     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(02)00982-1     Document Type: Article

References (12)