Surface kinetics with low ion energy bombardment in fluorocarbon plasmas

Plasma Sources Science and Technology

Volumn 16, Issue 4, 2007, Pages 813-821

  Nelson, C T ^a   Sant, S P ^a   Overzet, L J ^a   Goeckner, M J ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; FLUOROCARBONS; FREE RADICALS; ION BOMBARDMENT; PARAMETER ESTIMATION; SPECTROSCOPIC ELLIPSOMETRY;

FLUOROCARBON PLASMAS; GAS CHEMISTRIES; ION ENERGY BOMBARDMENT; SURFACE KINETICS;

PLASMA SOURCES;

EID: 38849176999     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/4/017     Document Type: Article

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