Estimating Materials Parameters in Thin-Film BAW Resonators Using Measured Dispersion Curves

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 1, 2004, Pages 42-51

  Makkonen, Tapani ^a   Pensala, Tuomas ^b   Vartiainen, Juha ^a   Knuuttila, Jouni V ^a   Kaitila, Jyrki ^b   Salomaa, Martti M ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ANISOTROPY; COMPUTER SIMULATION; ELECTRODES; INTERFEROMETRY; OPTIMIZATION; PERMITTIVITY; PIEZOELECTRICITY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; ZINC OXIDE;

BRAGG REFLECTORS; BULK ACOUSTIC WAVES (BAW); LAMB WAVES;

THIN FILMS;

EID: 1342324691     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1268466     Document Type: Article

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