Ultra-thin and high-aspect-ratio TiN nanosheets

Journal of Crystal Growth

Volumn 310, Issue 4, 2008, Pages 853-860

  Huang, Tsung Yen ^a   Chen, Chien Chong ^a  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

A1. Crystal structure; A1. Nanostructures; A3. Chemical vapor deposition processes; B1. Nitrides; B1. Titanium compounds

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; TITANIUM NITRIDE; ULTRATHIN FILMS;

COMPLEX REACTIONS; LATTICE FRINGES; NANOSHEET THICKNESS;

NANOSHEETS;

EID: 38649142812     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.11.216     Document Type: Article

References (37)

1. Ted Oyama S. The Chemistry of Transition Metal Carbides and Nitrides (1996), Blackie Academic & Professional, New York p. 28
2. Soriano L., Abbate M., Pen H., Prieto P., and Sanz J.M. Solid State Commun. 102 (1997) 291
3. Buhl R., Pulker H.K., and Moll E. Thin Solid Films 80 (1981) 265
4. Niyomsoan S., Grant W., Olson D.L., and Mishra B. Thin Solid Films 415 (2002) 187
5. Hu J.C., Chang T.C., Chen L.J., Yang Y.L., Chen S.Y., and Chang C.Y. J. Vac. Sci. Technol. A 17 (1999) 2389
6. Kim J., Hong H., Oh K., and Lee C. Appl. Surf. Sci. 210 (2003) 231
7. Kim T.S., Park S.S., and Lee B.T. Mater. Lett. 59 (2005) 3929
8. Chandra R., Chawla A.K., Kaur D., and Ayyub P. Nanotechnology 16 (2005) 3053
9. Huang J.H., Yu K.J., Sit P., and Yu G.P. Surf. Coat. Technol. 200 (2006) 4291
10. Kawano S., Takahashi J., and Shimada S. J. Am. Ceram. Soc. 86 (2003) 1609
11. Feng X., Bai Y.J., Lu B., Wang C.G., Qi Y.X., Liu Y.X., Geng G.L., and Li L. Inorg. Chem. 43 (2004) 3558
12. Joshi U.A., Chung S.H., and Lee J.S. J. Solid State Chem. 178 (2005) 755
13. Kawano S., Takahashi J., and Shimada S. J. Mater. Chem. 12 (2002) 361
14. Qiu Y., and Gao L. J. Phys. Chem. B 109 (2005) 19732
15. Hsueh H.S., Yang C.T., Zink J.I., and Huang M.H. J. Phys. Chem. B 109 (2005) 4404
16. Yang X.G., Li C., Yang B.J., Wang W., and Qian Y.T. Chem. Phys. Lett. 383 (2004) 502
17. Spengler W., Kaiser R., Christensen A.N., and Muller-Vogt G. Phys. Rev. B 17 (1978) 1095
18. Constable C.P., Yarwood J., and Münz W.D. Surf. Coat. Technol. 116-119 (1999) 155
19. Chowdhury R., Vispute R.D., Jagannadham K., and Narayan J. J. Mater. Res. 11 (1996) 1458
20. Guillot J., Chappe J.M., Heintz O., Martin N., Imhoff L., and Takadoum J. Acta Mater. 54 (2006) 3067
21. Drygas M., Czosnek C., Paine R.T., and Janik J.F. Chem. Mater. 18 (2006) 3122
22. Strydom I.L., and Hofmann S. J. Electron Spectrosc. Relat. Phenom. 56 (1991) 85
23. Bertoti I. Surf. Coat. Technol. 151-152 (2002) 194
24. Ning J., Zhang H.J., Bao S.N., Shen Y.G., and Zhou Z.F. Physica B 352 (2004) 118
25. Liu Y., Treadwell D.R., Kannisto M.R., Mueller B.L., and Laine R.M. J. Am. Ceram. Soc. 80 (1997) 705
26. Shiao M.H., and Shieu F.S. Thin Solid Films 386 (2001) 27
27. Germain V., Li J., Ingert D., Wang Z.L., and Pileni M.P. J. Phys. Chem. B 107 (2003) 8717
28. Bell D.C., Wu Y., Barrelet C.J., Gradecak S., Xiang J., Timko B.P., and Lieber C.M. Microsc. Res. Tech. 64 (2004) 373
29. Jin R.C., Cao Y.W., Mirkin C.A., Kelly K.L., Schatz G.C., and Zheng J.G. Science 294 (2001) 1901
30. Lauhon L.J., Gudiksen M.S., Wang D., and Lieber C.M. Nature 420 (2002) 57
31. Lew K.K., Pan L., Dickey E.C., and Redwing J.M. Adv. Mater. 15 (2003) 2073
32. Shankar S.S., Rai A., Ankamwar B., Singh A., Ahmad A., and Sastry M. Nat. Mater. 3 (2004) 482
33. Malis T., Cheng S.C., and Egerton R.F. J. Electron Microsc. Tech. 8 (1988) 193
34. Williams D.B., and Carter C.B. Transmission Electron Microscopy: a Textbook for Materials Science (1996), Plenum Press, New York and London p. 667
35. Paulasto M., Kivilahti J.K., and Vanloo F.J.J. J. Appl. Phys. 77 (1995) 4412
36. Peng Y.C., Chen L.J., Hsieh W.Y., Yang Y.R., and Hsieh Y.F. Appl. Surf. Sci. 142 (1999) 336
37. Fouad O.A., Yamazato M., Ichinose H., and Nagano M. Appl. Surf. Sci. 206 (2003) 159