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Volumn 16, Issue 12, 2005, Pages 3053-3056
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Structural, optical and electronic properties of nanocrystalline TiN films
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
SPECTROPHOTOMETERS;
TITANIUM NITRIDE;
X RAY DIFFRACTION;
DC MAGNETRON SPUTTERING;
GAS MIXTURES;
SPUTTERING GAS;
THIN FILMS;
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EID: 27944508188
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/16/12/054 Document Type: Article |
Times cited : (33)
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References (21)
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