Relationship between the structure and the optical and electrical properties of reactively sputtered carbon nitride films

Solid State Communications

Volumn 145, Issue 7-8, 2008, Pages 392-396

  Alibart, F ^a   Durand Drouhin, O ^a   Debiemme Chouvy, C ^b   Benlahsen, M ^a  

^a Universite de Picardie Jules Verne   (France)

^b SORBONNE UNIVERSITÉ   (France)

Author keywords

A. Thin Film; D. Dielectric response; D. Electronic states (localized); D. Electronic transport

Indexed keywords

CARBON NITRIDE; DIELECTRIC MATERIALS; ELECTRONIC STATES; MOLECULAR STRUCTURE; PARTIAL PRESSURE; THIN FILMS;

CARBON NITRIDE FILMS; DIELECTRIC RESPONSE; ELECTRONIC TRANSPORT; NITROGEN PARTIAL PRESSURE (NPP);

CARBON FILMS;

EID: 38649124342     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2007.11.025     Document Type: Article

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