Electrical properties of reactively sputtered carbon nitride films

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 54-58

  Monclus, M A ^a   Cameron, D C ^a   Barklie, R ^b   Collins, M ^b  

^a DUBLIN CITY UNIVERSITY   (Ireland)

^b TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

Carbon nitride films; Electrical properties; Sputtering

Indexed keywords

ACTIVATION ENERGY; ELECTRON SPIN RESONANCE SPECTROSCOPY; ELECTRONIC DENSITY OF STATES; ENERGY GAP; INORGANIC COATINGS; NITROGEN; SPUTTERING; THIN FILMS;

CARBON NITRIDE;

NITRIDES;

EID: 0033356887     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00070-5     Document Type: Article

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