Structural and mechanical properties of AIN films by pulsed bias arc ion plating

Materials Science Forum

Volumn 561-565, Issue PART 2, 2007, Pages 1157-1160

  Zhang, Min ^a   Lin, Guoqiang ^a   Wu, Aimin ^a   Hao, Shengzhi ^a   Dong, Chuang ^a   Wen, Lishi ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

AlN thin films; Arc ion plating; Mechanical property; Pulsed bias

Indexed keywords

GRAIN SIZE AND SHAPE; HARDNESS; PLATING; SPECTROPHOTOMETERS; X RAY DIFFRACTION;

ARC ION PLATING; GLASS SUBSTRATES;

THIN FILMS;

EID: 38349145932     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-462-6.1157     Document Type: Conference Paper

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