Investigation of aluminum nitride grown by metal-organic chemical-vapor deposition on silicon carbide

Journal of Applied Physics

Volumn 82, Issue 6, 1997, Pages 2990-2995

  Zetterling, C M ^a   Ostling M ^a   Wongchotigul, K ^b   Spencer, M G ^b   Tang, X ^b   Harris, C I ^c   Nordell, N ^c   Wong, S S ^d  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b HOWARD UNIVERSITY   (United States)

^c ACREO AB   (Sweden)

^d Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000138239     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366136     Document Type: Article

References (12)

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