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Volumn 155, Issue 3, 2008, Pages

Thermal stability and interface diffusion behaviors of electrolessly deposited CoWP and Cu films

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTALLIZATION; DIFFUSION BARRIERS; ELECTROLESS PLATING; ELECTROMIGRATION; THERMODYNAMIC STABILITY;

EID: 38349104355     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2829890     Document Type: Article
Times cited : (13)

References (29)
  • 1
    • 0001919630 scopus 로고    scopus 로고
    • SITLDD 0163-3767.
    • L. Peter, Semicond. Int. SITLDD 0163-3767, 9, 64 (1998).
    • (1998) Semicond. Int. , vol.9 , pp. 64
    • Peter, L.1
  • 5
    • 4644368968 scopus 로고    scopus 로고
    • in Metal Based Thin Films for Electronics, K. Wetzig and C. M. Schneider, Editors, Wiley-VCH, Weinheim, Germany.
    • E. Zschech, in Metal Based Thin Films for Electronics, K. Wetzig, and, C. M. Schneider, Editors, p. 222, Wiley-VCH, Weinheim, Germany (2003).
    • (2003) , pp. 222
    • Zschech, E.1
  • 11
    • 21344474097 scopus 로고    scopus 로고
    • JAPIAU 0021-8979 10.1063/1.1805188.
    • V. Sukharev and E. Zschech, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1805188, 96, 6337 (2004).
    • (2004) J. Appl. Phys. , vol.96 , pp. 6337
    • Sukharev, V.1    Zschech, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.