Selective and blanket electroless copper deposition for ultralarge scale integration

Journal of the Electrochemical Society

Volumn 144, Issue 3, 1997, Pages 898-908

  Dubin, Valery M ^a,c   Shacham Diamand, Yosi ^a,d   Zhoo, Bin ^b,d   Vasudev, P K ^b   Ting, Chiu H ^c  

^a National Nanofabrication Facility   (United States)

^b SEMATECH   (United States)

^c ADVANCED MICRO DEVICES   (United States)

^d ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ASPECT RATIO; COPPER PLATING; DISSOLUTION; ELECTRIC CONDUCTIVITY OF SOLIDS; MASS TRANSFER; PASSIVATION; REACTION KINETICS; REDOX REACTIONS; SURFACE ROUGHNESS; THERMODYNAMICS; ULSI CIRCUITS;

BLANKET ELECTROLESS DEPOSITION; DIFFUSION BARRIERS; SELECTIVE ELECTROLESS DEPOSITION; TITANIUM NITRIDE;

ELECTROLESS PLATING;

EID: 0031095713     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837505     Document Type: Article

References (15)

1. E. K. Yung, L. T. Romankiw, and R. C. Alkire, This Journal, 136, 206 (1989).
2. P. L. Pai and C. H. Ting, IEEE Electron. Device Lett., EDL-10, 423 (1989).
3. C. H. Ting and M. Paunovic,This Journal, 136, 457 (1989); C. H. Ting, M. Paunovic, P. L. Pai, and G. Chiu, ibid., 136, 462 (1989).
4. C. H. Ting and M. Paunovic,This Journal, 136, 457 (1989); C. H. Ting, M. Paunovic, P. L. Pai, and G. Chiu, ibid., 136, 462 (1989).
5. Y. Shacham-Diamand, J. Micromech. Microeng., 1, 66 (1991).
6. V. M. Dubin, This Journal, 139, 633 (1992).
7. Y. Shacham-Diamand, V. M. Dubin, and M. Angyal, Thin Solid Films, 262, 93 (1995).
8. R. M. Lukes, Plating, 51, 1066 (1964).
9. M. Paunovic, ibid., 55, 1161 (1968).
10. J. J. Pesek and O. R. Melroy, J. Phys. Chem., 89, 4338 (1985).
11. V. V. Sviridov, T. N. Vorobjeva, T. B. Gaevski, and L. I. Stepanova, Electroless Metal Deposition in Aqueous Solutions, Belorussian State University, Minsk, Belarus (1987).
12. A. Molenaar, M. F. E. Holdrinet, and L. K. H. van Beek, Plating, 61, 238 (1974).
13. A. Hung and K.-M. Chen, This Journal, 136, 72 (1989).
14. V. L. Kubasov and S. A. Zarezkij, Fundamentals of Electrochemistry, Publishing House "Chemistry," Moscow, Russia (1976).
15. J. S. H. Cho, H. K. Kang, S. S. Wong, and Y. Shacham-Diamand, MRS Bull., No. 6, 31 (1993).