The role of ultraviolet radiation during ultralow k films curing: Strengthening mechanisms and sacrificial porogen removal

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  Zenasni, Aziz ^a   Jousseaume, Vincent ^a   Holliger, Philippe ^a   Favennec, Laurent ^b   Gourhant, Olivier ^b   Maury, Patrick ^b   Gerbaud, Guillaume ^a  

^a CEA LETI   (France)

^b STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; NUCLEAR MAGNETIC RESONANCE; ULTRAVIOLET RADIATION;

BULK DENSIFICATION; FILM STRENGTH; FREE VOLUME REDUCTION; SILANOL;

DIELECTRIC FILMS;

EID: 37549026231     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2805451     Document Type: Article

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