Mechanical properties of porous MSQ films: Impact of the porogen loading and matrix crosslinking

Materials Research Society Symposium Proceedings

Volumn 863, Issue , 2005, Pages 17-22

  Ciaramella, F ^a   Jousseaume, V ^a   Maitrejean, S ^a   Remiat B ^a   Verdier, M ^b   Passemard, G ^c  

^a CEA LETI   (France)

^b UNIV GRENOBLE ALPES   (France)

^c STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; DEGRADATION; DIELECTRIC MATERIALS; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; POROSITY; POROUS MATERIALS;

MSQ FILMS; NANOINDENTATION; POROGEN LOADING; POROUS FILM MODULUS;

SEMICONDUCTOR MATERIALS;

EID: 28844491832     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-863-b1.4     Document Type: Conference Paper

References (8)

1. M. Fayolle, G. Passemard, O. Louveau, F. Fusalba and J. Cluzel, Microelectron. Eng. 70 (2003) 255.
2. J.M. Calvert, M.K. Gallagher, semiconductor international (2003) 56.
3. M.Verdier, M.Montagnat, S.Maîtrejean and G.Passemard, Mater. Res. Soc. Proc. (2004) 795.
4. W.C. Oliver and G.M. Pharr, J. Mater. Res. 19 (2004) 3.
5. J. Mencik, J. Mater. Res. 12 (1997) 2475.
6. N.M. Jennett and A.J. Bushby, Mater. Res. Soc. Symp. Proc. (2002) 695.
7. A. Grill and D. Neumayer, J. Appl. Phys. (2003) 94
8. L.J. Gibson and M.F. Ashby, "Cellular solids: structure and properties", 2nd edition, Cambridge University Press, Cambridge, (1997)