Parameter extraction from simple electrical measurements on surface micromachined cantilevers

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 4, 2007, Pages

  Bhat, Somashekara ^a   Bhattacharya, Enakshi ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Cantilever; Capacitive sensor; Microelectromechanical systems; Polysilicon; Pull in voltage; Resonance; Young's modulus

Indexed keywords

ELASTIC MODULI; MICROMACHINING; PARAMETER EXTRACTION; POLYSILICON; RESONANCE; SURFACE PROPERTIES;

CANTILEVERS; CAPACITIVE SENSORS; PULL-IN VOLTAGE;

MEMS;

EID: 37549002897     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2794291     Document Type: Article

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