Stiction force estimation from attachment length and electrostatic measurements on cantilever beams

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6111, Issue , 2006, Pages

  Bhattacharya, Enakshi ^a   Basu, Souvik ^a   Prabhakar, Anil ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Attachment length; Pull out voltage; Stiction force; Surface energy; Surface micromachining

Indexed keywords

ELASTIC MODULI; ELECTROSTATICS; INTERFACIAL ENERGY; MACHINE DESIGN; MATHEMATICAL MODELS; MICROMACHINING; STICTION;

ATTACHMENT LENGTH; PULL-OUT VOLTAGE; STICTION FORCE; SURFACE MICROMACHINING;

CANTILEVER BEAMS;

EID: 33646053823     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.640506     Document Type: Conference Paper

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