Nonlinear and linearized algorithms for the Young's modulus extraction of thin films through the capacitance-voltage measurement of microstructures

Journal of Applied Physics

Volumn 98, Issue 10, 2005, Pages

  Hu, Yuh Chung ^a   Tu, Wei Hsiang ^a  

^a HUAFAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING PADS; LINEARIZED ALGORITHMS; MICROCANTILEVERS;

ALGORITHMS; CAPACITANCE; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SILICON; SINGLE CRYSTALS;

THIN FILMS;

EID: 28644431585     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2133898     Document Type: Article

References (22)

1. Stephen D. Senturia, Microsystem Design (Kluwer Academic, Boston, 2001).
2. P. M. Osterberg and S. D. Senturia, J. Microelectromech. Syst. 6, 107 (1997).
3. K. E. Petersen, IEEE Trans. Electron Devices ED-25, 1241 (1978).
4. H. A. C. Tilmans, "Micro-mechanical sensors using encapsulate built-in resonant strain gauges," Ph.D. dissertation, MESA Research Institute, University Twente, Enschede, The Netherlands (1993).
5. F. Maseeh, M. A. Schmidt, M. G. Allen, and S. D. Senturia, in Proceedings of the IEEE Solid State Sensor and Actuator Workshop (IEEE, Hilton Head Island, SC, 1988), Vol. 84.
6. S. Wang, S. Crary, and K. Najafi, in Proceedings of the Materials Research Society Symposium MRS (San Francisco, CA, 1992), Vol. 203.
7. J. A. Schweitz, MRS Bull. 17, 34 (1992).
8. S. D. Senturia, in Proceeding of the IEEE Transducers'87 (IEEE, Tokyo, Japan, 1987), Vol. 11.
9. M. G. Allen, M. Mehregany, R. T. Howe, and S. D. Senturia, Appl. Phys. Lett. 51, 241 (1987).
10. K. Najafi and K. Suzuki, in Proceedings of the IEEE MEMS'89 (IEEE, Salt Lake City, UT, 1989), Vol. 96.
11. M. J. Kobrinsky, E. R. Deutsch, and S. D. Senturia, J. Microelectromech. Syst. 9, 361 (2000).
12. E. D. Chan, K. Garikipati, and R. W. Dutton, J. Microelectromech. Syst. 8, 208 (1999).
13. P. Osterberg, H. Yie, X. Cai, J. White, and S. D. Senturia, in Proceedings of the IEEE MEMS'94 (IEEE, Osio, Japan, 1994), Vol. 28.
14. B. E. Artz and L. W. Cathy, in Proceeding of the IEEE Transducers'92 (1992), Vol. 190.
15. V. L. Rabinovich, in Proeeding of the IEEE Transducers'99 (1999), Vol. 2P1.7.
16. J. R. Gilbert, P. M. Osterberg, R. M. Harris, D. O. Ouma, X. Cai, and A. Pfajfer, in Proceedings of the IEEE MEMS'93 (1993), Vol. 207.
17. M. Fischer, M. Giousouf, J. Schaepperle, D. Eichner, M. Weinmann, W. von Munch, and F. Assmus, Sens. Actuators, A 67, 89 (1998).
18. Rob Legtenberg, John Gilbert, Stephen D. Senturia, and Miko Elwenspoek, J. Microelectromech. Syst. 6, 257 (1997).
19. Byung Chai Lee and Eun Sok Kim, J. Microelectromech. Syst. 9, 399 (2000).
20. Yuh-Chung Hu, C. M. Chang, and S. C. Huang, Sens. Actuators, A 112, 155 (2004).
21. Yuh-Chung Hu, Yung-Hsiang Wang, and Shyh-Chin Huang, in Proceedings of the 1st International Symposium on Micro and Nano Technology (ISMNT, Honolulu, Hawaii, 2004), Vol. III-2-01.
22. Marc J. Madou, Fundamentals of Microfabrication (CRC, New York, 2002).