Cantilever based mass sensor with hard contact readout

Applied Physics Letters

Volumn 88, Issue 26, 2006, Pages

  Dohn, S ^a   Hansen, O ^b   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b DANISH NATIONAL RESEARCH FOUNDATION   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; NATURAL FREQUENCIES; PORTABLE EQUIPMENT; SIGNAL TO NOISE RATIO; VIBRATION CONTROL;

EXCITATION FREQUENCY; MASS SENSORS; NANOELECTROMECHANICAL CANTILEVERS; OFF-CHIP ELECTRONICS;

SENSORS;

EID: 33745633628     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2217161     Document Type: Article

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