Simple measurement technique for resonance frequency of micromachined cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6463, Issue , 2007, Pages

  Bhat, Somashekara ^a,b   Bhattacharya, Enakshi ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b MANIPAL INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Cantilever; Gravimetry; MEMS; Polysilicon; Pull in; Resonance; Vibrometer; Wet etching

Indexed keywords

DOPPLER VIBROMETRY; FREQUENCY SETTING; OSCILLATION AMPLITUDE;

DOPING (ADDITIVES); ITERATIVE METHODS; MEMS; NATURAL FREQUENCIES; POLYSILICON; VOLTAGE CONTROL;

CANTILEVER BEAMS;

EID: 34247346487     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.698280     Document Type: Conference Paper

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