RF measurement techniques for micro-cantilever characterization and application

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 310-313

  Wang, Chieh Hsiao ^a   Weber, Robert J ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

MEMS; Microstrip line; MUMPs; Pull in voltage

Indexed keywords

AMPLIFIERS (ELECTRONIC); APPROXIMATION THEORY; CAPACITANCE; CAPACITORS; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; EQUIVALENT CIRCUITS; MICROSTRIP LINES; SENSORS;

MUMPS; PULL-IN VOLTAGE; REFLECTION COEFFICIENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 6344278750     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. W. C. Tang, T. H. Nguyen, M. W. Judy, and R.T. Howe, "Electrostatic- comb drive of lateral polysilicon resonators," Sensors and Actuators, vol. A21-A23, pp. 328-33 (1990)
2. J. Cao and C. T. -C. Nguyen, "Drive Amplitude Dependence of Micromechanical Resonator Series Motional Resistance," Digest of Technical Papers, 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 1999, pp. 1826-1829.
3. David A. Koester, Ramaswamy Mahadevan, Busbee Hardy, and Karen W. Markus, MUMPs Design Handbook Revision 6.0, Cronos Integrated Microsystems, http://www.memsrus.com/cronos