A new chemical path for fabrication of nanocrystalline diamond films

Journal of Crystal Growth

Volumn 310, Issue 2, 2008, Pages 261-265

  Tang, C J ^a,b   Neves, A J ^a   Grácio, José ^b   Fernandes, A J S ^a   Carmo, M C ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

^b UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

A1. Characterization; A3. Chemical vapor deposition process; B1. Diamond; B1. Nanomaterials

Indexed keywords

CHARACTERIZATION; DIAMONDS; GRAIN SIZE AND SHAPE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SYNTHESIS (CHEMICAL); THIN FILMS;

CRYSTALLINE QUALITY; NANOCRYSTALLINE DIAMOND FILMS;

NANOCRYSTALLINE MATERIALS;

EID: 37349104947     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.10.051     Document Type: Article

References (27)

1. Xiao X.C., Elam J.W., Trasobares S., Auciello O., and Carlisle J.A. Adv. Mater. 17 (2005) 1496
2. Birrell J., Gerbi J.E., Auciello O.A., and Carlisle J.A. J. Phys.: Condens. Matter 18 (2006) S1771
3. Xiao X., Birrell J., Gerbi J.E., Auciello O., and Carlisle J.A. J. Appl. Phys. 96 (2004) 2232
4. Birrell J., Carlisle J.A., Auciello O., Gruen D.M., and Gibson J.M. Appl. Phys. Lett. 81 (2002) 2235
5. Zhou D., McCauley T.G., Qin L.C., Krauss A.R., and Gruen D.M. J. Appl. Phys. 83 (1998) 540
6. Gruen D.M., Liu S., Krauss A.R., Luo J., and Pan X. Appl. Phys. Lett. 64 (1994) 1502
7. May P.W., Ashfold M.N.R., and Mankelevich Yu.A. J. Appl. Phys. 101 (2007) 053115
8. Griffin J., and Ray P.C. Nanotechnology 17 (2006) 1225
9. Ye H., Jackman R.B., and Hing P. J. Appl. Phys. 94 (2003) 7878
10. Jones A.N., Ahmed W., Hassan I.U., Rego C.A., Sein H., Amar M., and Jackson M.J. J. Phys.: Condens. Matter 15 (2003) S2969
11. Amaral M., Fernandes A.J.S., Vila M., Oliveira F.J., and Silva R.F. Diamond Relat. Mater. 15 (2006) 1822
12. Tzeng Y., and Liu Y.K. Diamond Relat. Mater. 14 (2005) 261
13. Subramanian K., Kang W.P., Davidson J.L., and Hofmeister W.H. Diamond Relat. Mater. 14 (2005) 404
14. Corvin R.B., Harrison J.G., Catledge S.A., and Vohra Y.K. Appl. Phys. Lett. 80 (2002) 2550
15. Seo S.-H., Lee T.-H., Kim Y.-D., Park C.-K., and Park J.-S. Thin Solid Films 447-448 (2004) 212
16. Chen K.H., Bhusari D.M., Yang J.R., Lin S.T., Wang T.Y., and Chen L.C. Thin Solid Films 332 (1998) 34
17. Yang T.-S., Lai J.-Y., Wong M.-S., and Cheng C.-L. J. Appl. Phys. 92 (2002) 2133
18. Silva F., Bénédic F., Bruno P., and Gicquel A. Diamond Relat. Mater. 14 (2005) 398
19. Ferrari A.C., and Robertson J. Phys. Rev. B 63 (2001) 121405
20. Kuzmany H., Pfeiffer R., Salk N., and Günther B. Carbon 42 (2004) 911
21. Birrell J., Gerbi J.E., Auciello O., Gibson J.M., Johnson J., and Carlisle J.A. Diamond Relat. Mater. 14 (2005) 86
22. Fernandes A.J.S., Neto M.A., Almeida F.A., Silva R.F., and Costa F.M. Diamond Relat. Mater. 16 (2007) 757
23. Tang C.J., Neves A.J., and Fernandes A.J.S. Diamond Relat. Mater. 13 (2004) 203
24. Yan C.-S., and Vohra Y.K. Diamond Relat. Mater. 8 (1999) 2022
25. Bohr S., Haubner R., and Lux B. Appl. Phys. Lett. 68 (1996) 1075
26. Frenklach M., and Wang H. Phys. Rev. B 43 (1991) 1520
27. Harris S.J., and Weiner A.M. Appl. Phys. Lett. 55 (1989) 2179