Highly transparent nano-crystalline diamond films via substrate pretreatment and methane fraction optimization

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 34-39

  Chen, K H ^a   Bhusari, D M ^a   Yang, J R ^b   Lin, S T ^b   Wang, T Y ^c   Chen, L C ^c  

^a INSTITUTE OF ATOMIC AND MOLECULAR SCIENCES   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Diamond; High transparency; Nano crystalline; Smoothness

Indexed keywords

CHEMICAL BONDS; FILM GROWTH; GRAIN SIZE AND SHAPE; METHANE; NANOSTRUCTURED MATERIALS; OPTICAL FILMS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; TRANSPARENCY; X RAY SPECTROGRAPHS;

NANOCRYSTALLINE DIAMOND FILMS;

DIAMOND FILMS;

EID: 0032476304     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01023-2     Document Type: Article

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