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Volumn 13, Issue 1, 2004, Pages 203-208
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Study the effect of O2 addition on hydrogen incorporation in CVD diamond
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Author keywords
2828 cm 1 IR vibration; CVD diamond; Hydrogen incorporation; O2 addition
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Indexed keywords
ETCHING;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROGEN BONDS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SCATTERING;
RAMAN SPECTROSCOPY;
FILM QUALITY;
DIAMOND FILMS;
CHEMICAL VAPOR DEPOSITION;
DIAMOND;
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EID: 1642562947
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2003.10.032 Document Type: Article |
Times cited : (25)
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References (28)
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