Fabrication of micro-optical components in polymer using proton beam writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5347, Issue , 2004, Pages 255-263

  Bettiol, Andrew A ^a   Ansari, Kambiz ^a   Sum, Tze Chien ^a   Van Kan, Jeroen A ^a   Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Gratings; Microlens array; PMMA; Polymer; Proton beam writing; SU 8

Indexed keywords

GRATINGS; MICROLENS ARRAY; PMMA; PROTON BEAM WRITING; SU-8;

BANDWIDTH; DIFFRACTION GRATINGS; ELECTRON BEAMS; ELECTROSTATICS; FREE ELECTRON LASERS; LITHOGRAPHY; MICROLENSES; MICROSTRUCTURE; POLYMERS; PROTON BEAMS; REFRACTION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SURFACE ROUGHNESS;

MICROOPTICS;

EID: 2142661568     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524300     Document Type: Conference Paper

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