Proton beam micromachining: A new tool for precision three-dimensional microstructures

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 370-374

  Van Kan, J A ^a   Bettiol, A A ^a   Wee, B S ^a   Sum, T C ^a   Tang, S M ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

High aspect ratio; Micromachining; Nuclear microscope; Plating; Proton beam

Indexed keywords

ASPECT RATIO; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; MICROSTRUCTURE; NICKEL; THREE DIMENSIONAL;

HIGH ASPECT RATIO; PROTON BEAM MICROMACHINING; THREE DIMENSIONAL MICROSTRUCTURE;

PROTON BEAMS;

EID: 0035424462     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00574-X     Document Type: Article

References (12)

1. Three-dimensional microfabrication using maskless irradiation with MeV ion beams: Proton-beam micromachining
2. Proton micromachining: A new technique for the production of three-dimensional microstructures
3. Micromachining using focused high energy ion beams: Deep ion beam lithography
4. A high resolution beam scanning system for deep ion beam lithography
5. SU-8: A low-cost negative resist for MEMS
6. The National University of Singapore nuclear microscope facility
7. Nuclear microprobe analysis and imaging: Current state of the art performances
8. Resist material for proton micromachining
9. The effect of external fields and slit scattering on the beam spot profile of the coupled triplet system