The use of proton microbeams for the production of microcomponents

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161-163, Issue , 2000, Pages 83-89

  Osipowicz, T ^a   Van Kan, J A ^a   Sum, T C ^a   Sanchez, J L ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

High aspect ratio; Micromachining; Nuclear microscope

Indexed keywords

ASPECT RATIO; HIGH ENERGY PHYSICS; ION BEAMS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; PROTONS;

MICROCOMPONENTS; NUCLEAR MICROSCOPES; PROTON MICROBEAMS;

MICROMACHINING;

EID: 0033876265     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00670-9     Document Type: Article

References (15)

1. E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeier, Microelect. Eng. 4 (1986) 35.
2. W. Ehrfeld, H. Lehr, Radiat. Phys. Chem. 45 (1995) 349.
3. S.V. Springham, T. Osipowicz, J.L. Sanchez, L.H. Gan, F. Watt, Nucl. Instr. and Meth. B 130 (1977) 155.
4. M.B.H. Breese, G.W. Grime, F. Watt, D. Williams, Nucl. Instr. and Meth. B 77 (1993) 169.
5. D.G. de Kerckhove, M.B.H. Breese, M.A. Marsh, G.W. Grime, Nucl. Instr. and Meth. B 136 (1998) 379.
6. L.M. Mason, A. Roberts, D.N. Jamieson, A. Saint, in: J.S. Williams, R.G. Elliman, M.C. Ridgway (Eds.), Ion Beam Modification of Materials, ISBN: 0-444-82334-4, North-Holland, 1996, p. 1110.
7. J.L. Sanchez, J.A. van Kan, T. Osipowicz, S.V. Springham, F. Watt, Nucl. Instr. and Meth. B 136-138 (1998) 385.
8. J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. Watt, Nucl. Instr. and Meth. B 148 (1999) 1085.
9. J.L. Sanchez, G. Guy, J.A. van Kan, T. Osipowicz, F. Watt, Nucl. Instr. and Meth. B 158 (1999) 185.
10. J.Z. Yang, E.H. Tay, J.A. van Kan, J.L. Sanchez, F. Watt, to be published.
11. J.A. van Kan, J.L. Sanchez, B. Xu, T. Osipowicz, F. Watt, Nucl. Instr. and Meth. B 158 (1999) 179.
12. F. Watt, Nucl. Instr. and Meth. B 158 (1999) 165.
13. F. Watt, I. Orlic, K.K. Loh, C.H. Sow, P. Thong, S.C. Liew, T. Osipowicz, T.F. Choo, S.M. Tang, Nucl. Instr. and Meth. B 85 (1994) 708.
14. F. Watt, T. Osipowicz, T.F. Choo, I. Orlic, S.M. Tang, Nucl. Instr. and Meth. B 136-138 (1998) 313.
15. D.J.W. Mous, R.G. Haitsma, T. Butz, R.H. Flagmeyer, D. Lehman, J. Vogt, Nucl. Instr. and Meth. B 130 (1997) 31.