Fabrication of two dimensional GaN nanophotonic crystals (31)

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2632-2636

  Rong, Bifeng ^a   Salemink, Huub W M ^a,b   Roeling, Erik M ^b   Van Der Heijden, Rob ^b   Karouta, Fouad ^b   Van Der Drift, Emile ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; GAS MIXTURES; ION BOMBARDMENT; PLASMA ETCHING; TWO DIMENSIONAL;

ANISOTROPIC PHOTONIC CRYSTAL; ION ENERGY; NANOPHOTONIC CRYSTALS;

PHOTONIC CRYSTALS;

EID: 37149017373     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794066     Document Type: Article

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