Hybrid semiconductor/nanoelectronic circuits: Freeing advanced lithography from the alignment accuracy burden

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2531-2536

  Likharev, Konstantin K ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MIXED-SIGNAL NETWORKS; MOORE'S LAW;

DIGITAL CIRCUITS; LITHOGRAPHY; LOGIC CIRCUITS; NANOELECTRONICS; SWITCHING;

SEMICONDUCTOR DEVICES;

EID: 37149001845     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794060     Document Type: Article

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