Strategies in automatic microhandling

Proceedings of the 2007 IEEE International Conference on Mechatronics and Automation, ICMA 2007

Volumn , Issue , 2007, Pages 69-75

  Zhou, Quan ^a,b,c  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b IEEE   (China)

^c AALTO UNIVERSITY   (Finland)

Author keywords

Automation; Microhandling; Micromanipulation; Microrobotics; Physics based method

Indexed keywords

MICROHANDLING; MICROMANIPULATION; MICROROBOTICS; PHYSICS-BASED METHOD;

INDUSTRIAL ROBOTS; MANIPULATORS; MOTION PLANNING; ROBOT APPLICATIONS;

ROBOTICS;

EID: 37049017803     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMA.2007.4303518     Document Type: Conference Paper

References (32)

1. Arai, F., Ando, D., Fukuda, T., Nododa, Y., and Oota, T., "Micro Manipulation Based on Micro Physics - Strategy Based on Attractive Force Reduction and Stress Measurement", IEEE/RSJ International Workshop on Intelligent Robots and Systems, IROS'95, vol. 2, pp. 263-241, 1995.
2. Fearing, R. S., "Survey of Sticking Effects for Micro Parts Handling", IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS-95, pp.212-127, Pittsburgh, PA, USA, 1995.
3. Kortschack, A., Fatikow, S., "Development of a mobile nanohandling robot", Journal of Micromechatronics, Vol. 2, pp. 249-269, 2004.
4. Gauthier, M., Regnier, S., Rougeot, P., Chaillet, N., "Analysis of forces for micromanipulations in dry and liquid media", Journal of Micromechatronics, vol. 3, no. 3, p 389-413, 2006.
5. Zhou, Q., Chang, B., Koivo, H.N., "Temperature and Humidity Effects on Micro/nano Handling", Materials Science Forum, vols. 532-533, pp. 681-684, 2006.
6. Israelachvili, J., Intermolecular and Surface Forces, 2 ed. London: Academic Press, 1992.
7. Shimada, E., Thompson, J.A., Yan, J., Wood, R.J., and Fearing, R.S., "Prototyping Millirobots using Dextrous Microassembly and Folding", Symposium on Mkrorobotics, ASME Int. Mechanical Engineering Cong. and Exp., DSC-Vol. 69-2, pp. 933-940, 2000.
8. Albut, A., Zhou, Q., del Corral, C., Koivo, H. N., "Development of Flexible Force-Controlled Piezo-Bimorph Microgripping System", Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 507-512, 2003.
9. Arai, F., Andou, D., Nonoda, Y., Fukuda, T., Iwata, H., Itoigawa, K., "Integrated micro end effector for micromanipulation", IEEE/ASME Transactions on Mechatronics, Vol.3, pp. 17 - 23, 1998.
10. Yang, G. Gaines, J.A., Nelson, B.J. "A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication", Journal of Intelligent and Robotic Systems, Vol. 37, pp. 43-68, 2003.
11. Danuser G., Pappas I., Voegeli B., Zesch, W., Dual J. "Manipulation of Microscopic Objects with Nanometer Precision: Potentials and Limiations in Nano-Robot Design", International Journal of Robotics Research, unpublished, August 1997.
12. Feddema, J. T., Xavier, P., and Brown, R., "Micro-assembly planning with van der Waals force", Journal of Micromechatronics, Vol.1, Page: 139-153, 2001.
13. Saito, S., Miyazaki, H.T., Sato, T., Takahashi, K., Onzawa, T., "Dynamics of micro-object operation considering the adhesive effect under an SEM", Microrobotics and Microassembly III, Bradley J. Nelson, Jean-Marc Breguet, Editors, Proceedings of SPIE Vol. 4586, pp. 12-23, 2001.
14. Kochan, A., "European project develops 'ice' gripper for micro-sized components", Assembly Automation, Vol. 17, pp. 114-115, 1997.
15. Lambert, P., Letier, P., Delchambre, A., "Capillary and surface tension forces in the manipulation of small parts", IEEE International Symposium on Assembly and Task Planning, ISATP'03, pp. 54-59, 2003.
16. Haliyo, D.S., Rollot, Y., Regnier, S., "Dynamical strategies for micromanipulation by adhesion", Microrobotics and Microassembly III, Bradley J. Nelson, Jean-Marc Breguet, Editors, Proceedings of SPIE Vol. 4586, pp. 261-269, 2001.
17. Dechev, N., Cleghorn, W.L., Mills, J.K., "Microassembly of 3-D Microstructures Using a Compliant, Passive Microgripper", Journal of Microelectromechanical Systems, Vol. 13, pp. 176 - 189, 2004.
18. Bohringer, K.F., Goldberg, K., Cohn, M., Howe, R., Pisano, A., "Parallel microassembly with electrostatic force fields", Proceedings of 1998 IEEE International Conference on Robotics and Automation, ICRA'98, pp. 1204-1211, 1998.
19. Hesselbach, J., Buttgenbach, S., Wrege, J., Butefisch, S., Graf, C., "Centering electrostatic microgripper and magazines for microassembly tasks", Microrobotics and Microassembly III, Bradley J. Nelson, Jean-Marc Breguet, Editors, Proceedings of SPIE, Vol. 4586, pp. 270-277, 2001.
20. Yeh, H.-J.J., Smith, J.S., "Fluidic self-assembly of microstructures and its application to the integration of GaAs on Si", Proceedings of IEEE Workshop on Micro Electro Mechanical Systems, MEMS'94, pp. 279-284, 1994.
21. Srinivasan, U., Helmbrecht, M.A., Rembe, C., Muller, R.S., Howe, R.T., "Fluidic self-assembly of micromirrors onto microactuators using capillary forces", IEEE Journal of Selected Topics in Quantum Electronics, Vol.8, Issue 1, pp. 4 -11, 2002.
22. Sato, K., Ito, K., Hata, S., Shimokohbe, A., "Self-alignment of microparts using liquid surface tension-behavior of micropart and alignment characteristics", Precision Engineering, Vol. 27, Issue 1, pp. 42-50, 2003.
23. del Corral, C., Zhou, Q., Albut, A., Chang, B, Franssila, S., Tuomikoski, S., Koivo, H.N. "Droplet Based Self-Assembly of SU-8 Microparts", Proceedings of 2nd VDE World Microtechnologies Congress, MICRO.tec 2003, Munich, Germany, pp. 293-298, 2003.
24. Feddema, J.T., Simon, R.W., "Visual servoing and CAD-drivenmicroassembly", IEEE Robotics & Automation Magazine, Vol.5, pp. 18-24, 1998.
25. Nelson, B., Yu Zhou, Vikramaditya, B., "Sensor-based microassembly of hybrid MEMS devices", IEEE Control Systems Magazine, Vol. 18, Issue 6, pp.35 - 45, 1998.
26. Sano, T., Nagahata, H., Yamamoto, H., "Automatic micromanipulation system using stereoscopic microscope", IEEE Instrumentation and Measurement Technology Conference, v 1, pp. 327-331, 1999.
27. Zhou, Q., Aurelian, A., Chang, B., del Corral, C., Koivo, H.N., "Microassembly System with Controlled Environment", Journal of Micromechatronics, Vol. 2, pp. 227 - 248, 2004.
28. Ferreira, A., Cassier, C., Hlrai, S., "Automatic Microassembly System Assisted by Vision Servoing and Virtual Reality", IEEE/ASME Transaction on Mechatronics, vol. 9, no. 2, pp. 321-333, 2004.
29. Thompson, J. A. and Fearing, R. S., " Automating microassembly with ortho-tweezers and force sensing", Proceedings of 2001 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'01, pp. 1327-1334, 2001.
30. Ferreira, A., Agnus, J., Chaillet, N., and Breguet, J.-M., "A. smart microrobot on chip: design, identification, and control", vol. 9, pp. 508-519, 2004.
31. Zhou, Q., Korhonen, P., Laitinen, J. and Sjövall, S. "Automatic dextrous microhandling based on a 6-DOF microgripper", Journal of Micromechatronics, Vol. 3, n. 3, pp. 359-387, 2006.
32. Zhou, Q. and Chang, B., "Microhandling using robotic manipulation and capillary self-alignment", Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'2006, October 10-13, Beijing, pp. 5883-5888, 2006.