Calibration of nitrogen content for GDOES depth profiling of complex nitride coatings

Journal of Analytical Atomic Spectrometry

Volumn 22, Issue 12, 2007, Pages 1512-1516

  Escobar Galindo, R ^a   Fornies E ^a   Gago, R ^b   Albella, J M ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COATINGS; MULTILAYERS; NANOCOMPOSITES; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

NANOMETRIC MULTILAYERS; NITROGEN QUANTIFICATION; QUANTITATIVE MEASUREMENTS;

NITRIDES;

EID: 36248939121     PISSN: 02679477     EISSN: 13645544     Source Type: Journal    
DOI: 10.1039/b711657h     Document Type: Article

References (25)

1. "Glow discharge optical emission spectrometry", ed., R. Payling, D. Jones, and, A. Bengtson, John Wiley & Sons, 1997
2. U. Beck G. Reiners Th. Wirth V. Hoffmann F. Präβler Thin Solid Films 1996 290-291 57 62
3. V. Hoffmann R. Dorka L. Wilken V. D. Hodoroaba K. Wetzig Surf. Interface Anal. 2003 35 7 575 582
4. K. Shimizu H. Habazaki P. Skeldon G. E. Thompson Spectrochim. Acta, Part B 2003 58 1573 1583
5. J. Angeli A. Bengston A. Bogaerts V. Hoffmann. V. Hodoroaba E. Steers J. Anal. At. Spectrom. 2003 18 670 679
6. M. R. Winchester R. Payling Spectrochim. Acta, Part B 2004 59 607 666
7. J. Pisonero B. Fernández R. Pereiro N. Bordel A. Sanz-Medel Trends Anal. Chem. 2006 25 11 18
8. R. Escobar Galindo R. Gago R E. Forniés A. Munoz-Martin A. Climent Font J. M. Albella Spectrochim. Acta, Part B 2006 61 545 553
9. V. D. Hodoroaba V. Hoffmann E. B. M. Steers M. Griepentrog A. Dück U. Beck J. Anal. At. Spectrom. 2006 21 74 81
10. EC Thematic Network on Glow Discharge Spectroscopy for Spectro-chemical Analysis ('GDS Net'), available at http://homepages.unl.ac.uk/∼ rogersi/gdsnet/
11. S. Baunack V. Hoffmann W. Zahn Microchim. Acta 2006 156 69 72
12. C. Tauziede, lecture at 3rd GD-Day meeting, Paris 29 September 2006
13. M. A. Auger R. Gago M. Fernández O. Sánchez J. M. Albella Surf. Coat. Technol. 2002 157 26 33
14. A. Climent-Font F. Pászti G. García M. T. Fernández-Jiménez F. Agulló Nucl. Instrum. Methods Phys. Res., Sect. B 2004 219-220 400 404
15. M. Mayer, SIMNRA User's Guide, IPP report 9/113, Max Plank Institute, 1997
16. A. Bengston T. Nelis Anal. Bioanal. Chem. 2006 385 3 568 585
17. http://www.jobinyvon.com
18. R. Payling, in Glow Discharge Optical Emission Spectroscopy, ed., R. Payling, D. G. Jones, and, A. Bengston, John Wiley & Sons, 1997, Section 1.3, pp. 20-47
19. A. Bengston, in Glow Discharge Optical Emission Spectroscopy, ed., R. Payling, D. G. Jones, and, A. Bengston, John Wiley & Sons, 1997, Section 10.3, pp. 472-482
20. R. Payling J. Michler M. Aeberhard Surf. Interface Anal. 2002 33 472 477
21. http://www.webelements.com
22. E. Forniés R. Escobar Galindo O. Sánchez J. M. Albella Surf. Coat. Technol. 2006 200 6047 6053
23. Presently, we are looking for companies that could produce this sort of sample with a precise control of the nitrogen content at a middle scale
24. V. D. Hodoroaba E. B. M. Steers V. Hoffmann W. E. S. Unger W. Paatsch K. Wetzig J. Anal. At. Spectrom. 2003 18 521 526
25. T. Nelis M. Aeberhard R. Payling J. Michler P. Chapon J. Anal. At. Spectrom. 2004 19 1354 1360