Quantitative nitrogen analysis by Auger electron spectrometry and glow discharge optical emission spectrometry

Microchimica Acta

Volumn 156, Issue 1-2, 2006, Pages 69-72

  Baunack, Stefan ^a   Hoffmann, Volker ^a   Zahn, Wieland ^b  

^a IFW DRESDEN   (Germany)

^b Westsachsische Hochschule Zwickau   (Germany)

Author keywords

AES; Depth profiling; Diffusion barrier; GDOES; Nitride; Quantification

Indexed keywords

EID: 33751415664     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-006-0587-9     Document Type: Conference Paper

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