The influence of oxygen flow on the tribological behaviour and residual stress of TiCO thin - Films

Journal of Optoelectronics and Advanced Materials

Volumn 8, Issue 2, 2006, Pages 712-715

  Munteanu, D ^a   Cozma, R ^a   Borcea, B ^a   Vaz, F ^b  

^a TRANSILVANIA UNIVERSITY OF BRASOV   (Romania)

^b UNIVERSITY OF MINHO   (Portugal)

Author keywords

Friction; Oxycarbide; Residual stress; Sputtering; Titanium; Wear

Indexed keywords

COMPRESSIVE STRESS; DEPOSITION; FRICTION; OXYGEN; SPUTTERING; STICTION; THIN FILMS; TITANIUM; TITANIUM CARBIDE; TRIBOLOGY; WEAR OF MATERIALS;

COMPRESSIVE RESIDUAL STRESS; HIGH COMPRESSIVE RESIDUAL STRESS; INFLUENCE OF OXYGEN; MAGNETRON SPUTTERED FILMS; OXYCARBIDES; PROCESS PARAMETERS; STATIC FRICTION COEFFICIENT; TRIBOLOGICAL BEHAVIOUR;

RESIDUAL STRESSES;

EID: 33646763916     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (8)

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