Preparation of TiC films by alternate deposition of Ti and C layers using a dual magnetron sputtering source

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 378-382

  Kusano, E ^a   Sato, A ^a   Kikuchi, N ^a   Nanto, H ^a   Kinbara, A ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Abrasive wear; Magnetron sputtering; Microhardness; Sliding wear; Titanium carbide

Indexed keywords

COATING; DEPOSITION; FILM; SLIDING WEAR;

EID: 17144461148     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00388-6     Document Type: Conference Paper

References (16)

1. Besmann T.M., Sinton D.P., Lowden R.A., Lee W.Y. Weimer A.W. Carbide, Nitride and Boride Materials Synthesis and Processing. 1997;Chapman & Hall, London. Chapter 22.
2. Droes S.R., Kodas T.T., Hampden-Smith M.J. Weimer A.W. Carbide, Nitride and Boride Materials Synthesis and Processing. 1997;Chapman & Hall, London. Chapter 23.
3. Randhawa H. Thin Solid Films. 153:1987;209.
4. Sundgren J.-E., Johansson B.-O., Karlsson S.-E., Hentzell H.T.G. Thin Solid Films. 105:1983;367.
5. Kusano E., Satoh A., Kitagawa M., Nanto H., Kinbara A. Thin Solid Films. 332:1998;1.
6. Ogrletree M.-P.D., Monteiro O.R. J. Vac. Sci. Technol. A. 15:1997;1943.
7. Voevodin A.A., Capson M.A., Laube S.J.P., Donley M.S., Zabinski J.S. Thin Solid Films. 298:1997;107.
8. JCPDS, Inorganic Materials Files, Card Number 50682.
9. JCPDS, Inorganic Materials Files, Card Number 321383.
10. Pierson H.O. Handbook of Refractory Carbides and Nitrides. 1996;48 Noyes Publications, Westwood, NJ.
11. Pierson H.O. Handbook of Refractory Carbides and Nitrides. 1996;49 Noyes Publications, Westwood, NJ.
12. Hoffman D.W. J. Vac. Sci. Technol. A. 12:1994;953.
13. Pierson H.O. Handbook of Refractory Carbides and Nitrides. 1996;67 Noyes Publications, Westwood, NJ.
14. Weimer A.W. Carbide, Nitride and Boride Materials Synthesis and Processing. 1997;650 Chapman & Hall, London.
15. Upadhyaya G.S. Nature and Properties of Refractory Carbides. 1996;420 Nova Science, Commack, NY.
16. Holmberg K., Matthews A. Coatings Tribology. 1994;242-243 Elsevier, Amsterdam.