Nanoporous polymeric transmission gratings for high-speed humidity sensing

Nanotechnology

Volumn 18, Issue 46, 2007, Pages

  Shi, Jinjie ^a   Hsiao, Vincent K S ^a   Huang, Tony Jun ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; HUMIDITY SENSORS; LIQUID CRYSTALS; SPECTROMETERS; WATER VAPOR;

COUPLED WAVE THEORY; HIGH-SPEED HUMIDITY SENSING; NANOPOROUS POLYMERIC TRANSMISSION GRATINGS; POLYMER-DISPERSED LIQUID CRYSTAL (H-PDLC);

ATMOSPHERIC HUMIDITY;

ADSORPTION; ARTICLE; DESORPTION; HUMIDITY; NANOPORE; POLYMERIZATION; PRIORITY JOURNAL; REPRODUCIBILITY; RESPONSE TIME; SENSITIVITY ANALYSIS; SPECTROMETER; WATER VAPOR; WAVEFORM;

EID: 36048963351     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/46/465501     Document Type: Article

References (39)

1. Yamazoe N and Shimizu Y 1986 Humidity sensors: principles and applications Sensors Actuators 10 379-98
2. Fenner R and Zdankiewicz E 2001 Micro-machined water vapor sensors: a review of sensing technologies IEEE Sensors 14 309-17
3. Huang J R, Li M Q, Huang Z Y and Liu J H 2007 A novel conductive humidity sensor based on field ionization from carbon nanotubes Sensors Actuators A 133 467-71
4. Chen Z and Lu C 2005 Humidity sensors: a review of materials and mechanisms Sensors Lett. 3 274-95
5. Kim S J, Park J Y, Lee S H and Yi S H 2000 Humidity sensors using porous silicon layer with mesa structure J. Phys. D: Appl. Phys. 33 1781-4
6. Okcan B and Akin T 2004 Proc. 17th IEEE Int. Conf. on Micro Electro Mechanical Systems (Maastricht, 2004) pp 552-5
7. Muto S, Osamu S, Takashi A and Masayuki M 2003 A plastic optical fibre sensor for real-time humidity monitoring Meas. Sci. Technol. 14 746-50
8. Traversa E 1995 Ceramic sensors for humidity detection: the state-of-the-art and future developments Sensors Actuators B 23 135-56
9. Kulwicki B M 1991 Humidity sensors J. Am. Ceram. Soc. 74 697-708
10. Kang U and Wise K D 2000 A high-speed capacitive humidity sensor with on-chip thermal reset IEEE Trans. Electron. Devices 47 702-10
11. Connolly E J, Pham H T M, Groeneweg J, Sarro P M and French P J 2004 Relative humidity sensors using porous SiC membranes and Al electrodes Sensors Actuators B 100 216-20
12. Seiyama T, Yamazoe N and Arai H 1983 Ceramic humidity sensors Sensors Actuators 4 85-96
13. Zambov L M, Popov C, Plass M F, Bock A, Jelinek M, Lancok J, Masseli K and Kulisch W 2000 Capacitance humidity sensor with carbon nitride detecting element Appl. Phys. A 70 603-6
14. Kalkan A K, Li H D, O'Brien C J and Fonash S J 2004 A rapid-response, high-sensitivity nanophase humidity sensor for respiratory monitoring IEEE Electron Device Lett. 25 526-8
15. Tsigara A, Mountrichas G, Gatsouli K, Nichelatti A, Pispas S, Madamopoulos N, Vainos N A, Du H L and Roubani-Kalantzopoulou F 2007 Hybrid polymer/cobalt chloride humidity sensors based on optical diffraction Sensors Actuators B 120 481-6
16. Wang J, Shi K, Chen L and Zhang X 2004 Study of polymer humidity sensor array on silicon wafer J. Mater. Sci. 39 3155-7
17. Zajt T, Jasĩski G and Chachuiski B 2003 Electrical properties of polymer humidity sensor based on polyethyleneimine Proc. SPIE 5124 130-7
18. 3 structures Ultrasonics Symp. pp 417-20
19. Wang J, Wu F Q, Shi K H, Wang X H and Sun P P 2004 Humidity sensitivity of composite material of lanthanum ferrite/polymer quaternary acrylic resin Sensors Actuators B 99 586-91
20. Sakai Y, Matuguchi M, Sadaoka Y and Hirayama K 1993 A humidity sensor composed of interpenetrating polymer networks of hydrophilic and hydrophobic methacrylate polymers J. Electrochem. Soc. 140 432-6
21. Nomura T, Oofuchi K, Yasuda T and Furukawa S 1994 SAW humidity sensor using dielectric hygroscopic polymer film Ultrasonics Symp. pp 503-6
22. Yang B, Aksak B, Lin Q and Sitti M 2006 Compliant and low-cost humidity sensors using nano-porous polymer membranes Sensors Actuators B 114 254-62
23. Yao Z and Yang M 2006 A fast response resistance-type humidity sensor based on organic silicon containing cross-linked copolymer Sensors Actuators B 117 93-8
24. Albrecht B A, Benson C H and Beuermann S 2003 Polymer capacitance sensors for measuring soil gas humidity in drier soils Geotech. Test. J. 26 3-11
25. Rubinger C P L, Martins C R, De Paoli M A and Rubinger R M 2007 Sulfonated polystyrene polymer humidity sensor: synthesis and characterization Sensors Actuators B 123 42-9
26. Steele J J, van Popta A C, Hawkeye M M, Sit J C and Brett M J 2006 Nanostructured gradient index optical filter for high-speed humidity sensing Sensors Actuators B 120 213-9
27. Adhikari B and Majumdar S 2004 Polymers in sensor applications Prog. Polym. Sci. 29 699-766
28. Connolly E J, O'Halloran G M, Pham H T M, Sarro P M and French P J 2002 Comparison of porous polysilicon and porous silicon carbide as materials for humidity sensing applications Sensors Actuators A 99 25-30
29. Rittersma Z M, Splinter A, Bödecker A and Benecke W 2000 A novel surface-machined capacitive porous silicon humidity sensor Sensors Actuators B 68 210-7
30. Laville C and Pellet C 2002 Comparison of three humidity sensors for a pulmonary function diagnosis microsystem IEEE Sensors J. 2 96-101
31. Tatara T and Tsuzaki K 1997 An apnea monitor using a rapid-response hygrometer J. Clin. Monit. 13 5-9
32. Matsuoka S, Wallder V T and Beauchamp H L 1971 Application of holographic interference technique to mechanical studies of polymeric solids Polym. Eng. Sci. 11 46-50
33. Bunning T J, Natarajan L V, Tondiglia V P and Sutherland R L 2000 Holographic polymer-dispersed liquid crystals (H-PDLCS) Annu. Rev. Mater. Sci. 30 83-115
34. Hsiao V K S, Lin T C, He G S, Cartwright A N and Prasad P N 2005 Optical microfabrication of highly reflective volume Bragg gratings Appl. Phys. Lett. 86 131113
35. Natarajan L V, Shepherd C K, Brandelik D M, Sutherland R L, Chandra S, Tondiglia V P, Tomlin D and Bunning T J 2003 Switchable holographic polymer-dispersed liquid crystal reflection gratings based on thiol-ene photopolymerization Chem. Mater. 15 2477-84
36. Hsiao V K S, Kirkey W D, Chen F, Cartwright A N, Prasad P N and Bunning T J 2005 Organic solvent vapor detection using holographic photopolymer reflection gratings Adv. Mater. 17 2211-4
37. Kogelnik H and Shank C V 1972 Coupled-wave theory of distributed feedback lasers J. Appl. Phys. 43 2327-35
38. Sheat D E and Miles A J M 1991 The 3rd Int. Conf. on Holographic Systems, Components, and Applications (Edinburgh, 1991) pp 83-7
39. Ciddor P E 1996 Refractive index of air: new equations for the visible and near infrared Appl. Opt. 35 1566-73