Novel surface-micromachined capacitive porous silicon humidity sensor

Sensors and Actuators, B: Chemical

Volumn 68, Issue 1, 2000, Pages 210-217

  Rittersma, Z M ^a   Splinter, A ^a   Bodecker A ^a   Benecke, W ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; DIELECTRIC MATERIALS; ELECTROCHEMICAL ELECTRODES; FABRICATION; POROUS SILICON; RESISTORS; VAPORS; WATER;

HUMIDITY SENSOR; REFRESH RESISTOR; THERMORESISTOR;

CHEMICAL SENSORS;

EID: 0034247981     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00431-7     Document Type: Article

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