A novel conductive humidity sensor based on field ionization from carbon nanotubes

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 467-471

  Huang, Jia Rui ^a,b   Li, Min Qiang ^a   huang, Zhong Ying ^a   Liu, Jin Huai ^a  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Humidity sensor; Ionization gas sensor; MWNTs; Prebreakdown current

Indexed keywords

ANODES; CARBON NANOTUBES; ELECTRIC CURRENTS; ELECTRIC FIELDS; IONIZATION; SENSITIVITY ANALYSIS;

HUMIDITY SENSOR; IONIZATION GAS SENSOR; PREBREAKDOWN CURRENT;

CHEMICAL SENSORS;

EID: 33846469907     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.020     Document Type: Article

References (20)

1. Buchhold R., Nakladal A., Gerlach G., and Neumann P. Design studies on piezoresistive humidity sensors. Sens. Actuators B 53 (1998) 1-7
2. Chatzandroulis S., Tserepi A., Goustouridis D., Normand P., and Tsoukalas D. Fabrication of single crystal Si cantilevers using a dry release process and application in a capacitive-type humidity sensor. Microelectron. Eng. 61-62 (2002) 955-961
3. Berlicki T.M., Murawski E., Muszynski M., Osadnik S.J., and Prociow E.L. Thermoelement humidity sensor. Sens. Actuators A 64 (1998) 213-217
4. Rittersma Z.M. Recent achievements in miniaturized humidity sensors a review of transduction techniques. Sens. Acturators A 96 (2002) 196-210
5. Carr-Brion K. Moisture Sensors in Process Control (1986), Elsevier Applied Science Publishers, London/New York
6. Ingram J.M., Greb M., Nicholson J.A., and Fountain III A.W. Polymeric humidity sensor based on laser carbonised polyimide substrate. Sens. Actuators B 96 (2003) 283-289
7. Mai L.H., Hoa P.T.M., Binh N.T., Ha N.T.T., and An D.K. Some investigation results of the instability of humidity sensors based on alumina and porous silicon materials. Sens. Actuators B 66 (2000) 63-65
8. de Jonge N., Lamy Y., Schoots K., and Oosterkamp T.H. High brightness electron beam from a multi-walled carbon nanotube. Nature 420 (2002) 393-395
9. Lee N.S., Chung D.S., Han I.T., Kang J.H., Choi Y.S., Kim H.Y., Park S.H., Jin Y.W., Yi W.K., Yun M.J., Jung J.E., Lee C.J., You J.H., Jo S.H., Lee C.G., and Kim J.M. Application of carbon nanotubes to field emission displays. Diamond Relat. Mater. 10 (2001) 265-270
10. de Heer W.A., Chatelain A., and Ugarte D. A carbon nanotube field-emission electron source. Science 270 (1995) 1179-1180
11. Bonard J.M., Croci M., Klinke C., Kurt R., Noury O., and Weiss N. Carbon nanotube films as electron field emitters. Carbon 40 (2002) 1715-1728
12. Miller M.K., Cerezo A., Hetherington M.G., and Smith G.D.W. Atom Probe Field Ion Microscopy (1996), Oxford University Press, Oxford
13. Modi A., Koratkar N., Lass E., Wei B.Q., and Ajayan P.M. Miniaturized gas ionization sensors using carbon nanotubes. Nature 424 (2003) 171-174
14. Riley D.J., Mann M., MacLaren D.A., Dastoor P.C., Allison W., Teo K.B.K., Amaratunga G.A.J., and Milne W. Helium detection via field ionization from carbon nanotubes. Nano Lett. 3 (2003) 1455-1458
15. Xu X.J., and Zhu D.C. Gas Discharge in Physics (1996), Fudan University Publishers, Shanghai
16. Zhang Z.J., Wei B.Q., Ramanath G., and Ajayan P.M. Substrate-site selective growth of aligned carbon nanotubes. Appl. Phys. Lett. 77 (2000) 3764-3766
17. Wei B.Q., Vajtai R., Jung Y., Ward J., Zhang R., Ramanath G., and Ajayan P.M. Organized assembly of carbon nanotubes. Nature 416 (2002) 495-496
18. Drotar J.T., Wei B.Q., Zhao Y.P., Ramanath G., Ajayan P.M., Lu T.M., and Wang G.C. Reflection high-energy electron diffraction from carbon nanotubes. Phys. Rev. B 64 (2001) 125417
19. Ristroph T., Goodsell A., Golovchenko J.A., and Hau L.V. Detection and quantized conductance of neutral atoms near a charged carbon nanotube. Phys. Rev. Lett. PRL 94 (2005) 066102
20. Doak R.B. The assessment of field ionization detectors for molecule beam use. J. Phys. Condens. Matter 16 (2004) S2863-S2878