Micromachined Water Vapor Sensors: A Review of Sensing Technologies

IEEE Sensors Journal

Volumn 1, Issue 4, 2001, Pages 309-317

  Fenner, Ralph ^a,b   Zdankiewicz, Edward ^a,c  

^a IEEE   (United States)

^b Hygrometrix Inc   (United States)

^c Hygrometrix Inc   (United States)

Author keywords

Capacitative; Microelectromechanical systems (mems); Microsensors; Moisture; Optical; Relative humidity; Resistive; Solid state; Strain gague; Technology roadmap

Indexed keywords

EID: 33748026777     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/7361.983470     Document Type: Article

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