Influence of oxygen content on the structural and sensing characteristics of Y2O3 sensing membrane for pH-ISFET

Sensors and Actuators, B: Chemical

Volumn 128, Issue 1, 2007, Pages 245-251

  Pan, Tung Ming ^a   Liao, Kao Ming ^a  

^a CHANG GUNG UNIVERSITY   (Taiwan)

Author keywords

Annealed at 800 C; Argon to oxygen flow ratio, 25 5, 20 10, 15 15; Drift rate; Hysteresis; Interfacial SiO2; Sensing membrane, Y2O3, EOS; Sensitivity; Silicate formation; Surface roughness

Indexed keywords

ELECTROLYTES; HYSTERESIS; MEMBRANES; OXYGEN; SENSITIVITY ANALYSIS; SILICON; SPUTTERING; SURFACE CHEMISTRY; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM COMPOUNDS;

ARGON-TO-OXYGEN FLOW RATIO; DRIFT RATE; SENSING CHARACTERISTICS; SENSING MEMBRANE; SILICATE FORMATION;

SENSORS;

EID: 35748953112     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.06.006     Document Type: Article

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