Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al 2O3-Ta2O5 and Al2O 3-ZrO2 Double-Oxide Thin Films

Journal of the Electrochemical Society

Volumn 151, Issue 3, 2004, Pages

  Yoshida, Shoji ^a   Hara, Nobuyoshi ^a   Sugimoto, Katsuhisa ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CORROSION RESISTANCE; CRYSTAL STRUCTURE; DISSOLUTION; ELLIPSOMETRY; ION SENSITIVE FIELD EFFECT TRANSISTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SENSITIVITY ANALYSIS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTROLYTE-INSULATOR-SEMICONDUCTOR (EIS) CAPACITORS; ION SENSTIVITY;

PH SENSORS;

EID: 1842530035     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1643074     Document Type: Article

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