Analysis of one-dimensional and two-dimensional thin film "pull-in" phenomena under the influence of an electrostatic potential

Journal of Applied Mechanics, Transactions ASME

Volumn 74, Issue 5, 2007, Pages 927-934

  Duan, Gang ^a   Wan, Kai Tak ^a  

^a Architectural and Environmental Engineering   (United States)

Author keywords

Electrostatic potential; MEMS; Pull in phenomena; RF switch; Surface forces

Indexed keywords

AXISYMMETRIC FILM; CAPACITIVE FILM-PAD; DIELECTRIC GAP; DUGDALE-BARENBLATT-MAUGIS COHESIVE ZONE APPROXIMATION; ELECTROSTATIC POTENTIAL;

DEFORMATION; DIELECTRIC DEVICES; ELECTROMAGNETIC WAVES; ELECTROSTATIC DEVICES; MEMS; ONE DIMENSIONAL; TWO DIMENSIONAL;

THIN FILMS;

EID: 35348914672     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2722311     Document Type: Article

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