Nanoindentation technique for characterizing cantilever beam style RF microelectromechanical systems (MEMS) switches

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1230-1235

  Lee, Hyukjae ^a   Coutu Jr , Ronald A ^b   Mall, Shankar ^a,c   Kladitis, Paul E ^a  

^a Air Force Institute of Technology   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; ELECTRIC CONTACTS; INDENTATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; WAVEGUIDES;

ACTUATION VOLTAGE; CONTACT RESISTANCE; NANOINDENTATION TECHNIQUE; RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS SWITCHES;

SWITCHES;

EID: 18744363621     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/013     Document Type: Article

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