Investigations of rf shunt airbridge switches among different environmental conditions

Sensors and Actuators, A: Physical

Volumn 114, Issue 1, 2004, Pages 49-58

  Schauwecker, Bernd ^a   Mehner, Jan ^b   Strohm, Karl M ^a   Haspeklo, Horst ^a   Luy, Johann Friedrich ^a  

^a DAIMLER AG   (Germany)

^b FEM ware GmbH   (Germany)

Author keywords

ANSYS ; Capacitive shunt airbridge switch; Mechanical modelling; Micromechanical structure; Microwave technique; RF MEMS

Indexed keywords

CAPACITANCE; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; EIGENVALUES AND EIGENFUNCTIONS; ELECTRIC SWITCHES; ENVIRONMENTAL IMPACT; EQUATIONS OF MOTION; MICROWAVES; OPTIMIZATION; TEMPERATURE MEASUREMENT;

ANSYS; CAPACITIVE SHUNT AIRBRIDGE SWITCHES; MECHANICAL MODELING; MICROMECHANICAL STRUCTURE; MICROWAVE TECHNIQUES; RF MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 3042777066     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.02.040     Document Type: Article

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