SCOPUS 정보 검색 플랫폼

Journal of Micromechanics and Microengineering

Volumn 14, Issue 7, 2004, Pages 1101-1108

The design of metal strain gauges on diaphragms

(5) Schomburg, W K a,c Rummler, Z a,d Shao, P a,e Wulff, K a,c Xie, L b

a KARLSRUHE INSTITUTE OF TECHNOLOGY (Germany)

b NORTHEASTERN UNIVERSITY (China)

c RWTH AACHEN UNIVERSITY (Germany)

d SAP RESEARCH (Germany)

e NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRAIN; ELASTIC ELEMENTS; MICRO DIAPHRAGMS; STRAIN DISTRIBUTION;

BOUNDARY CONDITIONS; COMPOSITE MICROMECHANICS; CRYSTAL LATTICES; DIAPHRAGMS; DOPING (ADDITIVES); ELASTIC MODULI; ELECTRIC CURRENTS; ELECTRIC RESISTANCE; FINITE ELEMENT METHOD; MACHINE DESIGN; STRAIN;

STRAIN GAGES;

EID: 3142661664 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/14/7/033 Document Type: Article

Times cited : (29)

References (8)

1
- 85044175194
- Delft: Delft University Press
- Middelhoek S and Audet S A 1994 Silicon Sensors (Delft University of Technology, Department of Electrical Engineering, Lecture et 05-31) (Delft: Delft University Press)
- (1994) Silicon Sensors (Delft University of Technology, Department of Electrical Engineering, Lecture et 05-31)
- Middelhoek, S.¹ Audet, S.A.²

2
- 0031705929
- Strain gauge pressure and volume-flow transducers made by thermoplastic molding and membrane transfer
- Martin J, Bacher W, Hagena O F and Schomburg W K 1998 Strain Gauge Pressure and Volume-Flow Transducers Made by Thermoplastic Molding and Membrane Transfer Proc. Int. Workshop on Micro Electro Mechanical Systems, MEMS '98 (Heidelberg, Germany, 25-29 Jan. 1998) 361-6
- (1998) Proc. Int. Workshop on Micro Electro Mechanical Systems, MEMS '98 (Heidelberg, Germany, 25-29 Jan. 1998) , pp. 361-366
- Martin, J.¹ Bacher, W.² Hagena, O.F.³ Schomburg, W.K.⁴

3
- 0037765111
- Dosing system for the nano liter range, fabricated with the AMANDA process
- Shao P, Rummler Z and Schomburg W K 2003 Dosing system for the nano liter range, fabricated with the AMANDA process J. Micromech. Microeng. 13 85-90
- (2003) J. Micromech. Microeng. , vol.13 , pp. 85-90
- Shao, P.¹ Rummler, Z.² Schomburg, W.K.³

4
- 0003491390
- New York: McGraw-Hill
- Timoshenko S and Woinowsky-Krieger S 1959 Theory of Plates and Shells 2nd edn (New York: McGraw-Hill)
- (1959) Theory of Plates and Shells 2nd Edn
- Timoshenko, S.¹ Woinowsky-Krieger, S.²

5
- 0002310405
- Mechanical properties of thin films of gold and silver
- ed C A Neugebauer, J B Newkirk and D A Vermilyea (New York: Wiley)
- Beams J W 1959 Mechanical properties of thin films of gold and silver Proc. Structure and Properties of Thin Films ed C A Neugebauer, J B Newkirk and D A Vermilyea (New York: Wiley) pp 183-92
- (1959) Proc. Structure and Properties of Thin Films , pp. 183-192
- Beams, J.W.¹

6
- 0031702530
- Design optimization of bistable microdiaphragm valves
- Schomburg W K and Goll C 1998 Design optimization of bistable microdiaphragm valves Sensors Actuators A 64 259-64
- (1998) Sensors Actuators A , vol.64 , pp. 259-264
- Schomburg, W.K.¹ Goll, C.²

7
- 3142655996
- Hybride Drucksensoren aus Kunststoff und Glas nach dem AMANDA Verfahren
- Wulff K, Rummler Z and Schomburg W K 2001 Hybride Drucksensoren aus Kunststoff und Glas nach dem AMANDA Verfahren (Wiss. Ber. Forschungszentrum Karlsruhe) 6682
- (2001) Wiss. Ber. Forschungszentrum Karlsruhe , vol.6682
- Wulff, K.¹ Rummler, Z.² Schomburg, W.K.³

8
- 17744414096
- Finite element investigations of the dynamical properties of micro-structured membranes
- Elsäßer R, Kamlah M and Tsakmakis C 1997 Finite element investigations of the dynamical properties of micro-structured membranes Microsystem Technol. 3 171-7
- (1997) Microsystem Technol. , vol.3 , pp. 171-177
- Elsäßer, R.¹ Kamlah, M.² Tsakmakis, C.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.