An analytical model for pull-in voltage of clamped-clamped multilayer beams

Sensors and Actuators, A: Physical

Volumn 116, Issue 1, 2004, Pages 15-21

  Rong, Hua ^a   Huang, Qing An ^a   Nie, Meng ^a   Li, Weihua ^a  

^a Southeast University   (China)

Author keywords

Clamped clamped multilayer beam; Deflection; Energy method; Pull in

Indexed keywords

CLAMPED-CLAMPED MULTILAYER BEAMS; DEFLECTIONS; ENERGY METHODS; PULL-IN;

COMPUTER SIMULATION; ELASTIC MODULI; ELECTRIC CONDUCTORS; ELECTRIC POTENTIAL; ELECTROSTATICS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY MEASUREMENT; PRESSURE CONTROL; RESIDUAL STRESSES; RESONATORS; SENSORS; STRAIN MEASUREMENT;

MULTILAYERS;

EID: 4444257701     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.027     Document Type: Article

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