Control of the composition and structure of silicon oxycarbide and oxynitride glasses derived from polysiloxane precursors

Journal of Sol-Gel Science and Technology

Volumn 14, Issue 1, 1999, Pages 27-38

  Mutin, P Hubert ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ARGON; CARBIDES; COMPOSITION EFFECTS; MOLECULAR STRUCTURE; NITRIDES; PYROLYSIS; SILICONES; THERMAL EFFECTS;

SILICON OXYCARBIDE; SILICON OXYNITRIDE;

GLASS;

EID: 0032633375     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1008769913083     Document Type: Article

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