Development of a step micro-imprint lithography tool

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 2039-2048

  Lan, Hongbo ^a,b   Ding, Yucheng ^a   Liu, Hongzhong ^a   Lu, Bingheng ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

^b SHANDONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MICROMETERS; OPTIMIZATION; PATTERN RECOGNITION; ULTRAVIOLET RADIATION;

FEATURE SIZES; ROOM TEMPERATURE; STEP MICROIMPRINT LITHOGRAPHY (SIL); UV IMPRINT LITHOGRAPHY;

LITHOGRAPHY;

EID: 34748815130     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/016     Document Type: Article

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