Controlling pressure in microsystem packages by on-chip microdischarges between thin-film titanium electrodes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 5, 2007, Pages 1711-1720

  Wright, Scott A ^a   Gianchandani, Yogesh B ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CHEMISORPTION; CHIP SCALE PACKAGES; ELECTRIC DISCHARGES; ELECTRODES; GLASS; THIN FILMS; TITANIUM;

ION PUMPS; MICRODISCHARGES;

MICROSYSTEMS;

EID: 34648818189     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2782510     Document Type: Article

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